Accuracy at calibration conditions after tare

± (0.8% of Reading + 0.2% of Full Scale)

High Accuracy at calibration conditions after tare

± (0.4% of Reading + 0.2% of Full Scale)
High Accuracy option not available for units ranged under 5 sccm or over 500 slpm.

Repeatability

± 0.2% Full Scale

Zero Shift and Span Shift

0.02% Full Scale / ºCelsius / Atm

Operating Range / Turndown Ratio

0.5% to 100% Full Scale / 200:1 Turndown

Maximum Controllable Flow Rate

100% Full Scale

Maximum Measurable Flow Rate

up to 128% Full Scale (Gas Dependent)

Typical Response Time

100 ms (Adjustable)

Warm-up Time

< 1 Second

Operating Conditions

MC & MCR Mass Flow Controller

Mass Reference Conditions (STP)

25ºC & 14.696 psia (standard — others available on request)

Operating Temperature

−10 to +60 ºCelsius

Humidity Range (Non–Condensing)

0 to 100%

Maximum Internal Pressure (Static)

145 psig

Proof Pressure

175 psig

Mounting Attitude Sensitivity

MC: None

MCR: Mount with valve cylinder vertical & upright

Valve Type

Normally Closed

Ingress Protection

IP40

Wetted Materials

MC: 303 & 302 Stainless Steel, Viton®, Heat Cured Silicone Rubber, Glass Reinforced Polyphenylene Sulfide, Heat Cured Epoxy, Aluminum, Gold, Brass, 430FR Stainless Steel, Silicon, Glass.
MCR: 302, 303 & 304 Stainless Steel, Viton®, Heat Cured Silicone Rubber, Glass Reinforced Polyphenylene Sulfide, Heat Cured Epoxy, Aluminum, Gold, 410 Stainless Steel, Silicon, Glass. If your application demands a different material, please contact Alicat.

Communications / Power

MC & MCR Mass Flow Controller

Monochrome LCD or Color TFT Display with integrated touchpad

Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature

Digital Communications Options1

RS-232 Serial / RS-485 Serial / Modbus RTU / PROFIBUS / EtherNet/IP / DeviceNet / Modbus TCP/IP / EtherCAT

Analog Signal2 Options

0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA

Optional Secondary Output Signal2

0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA

Electrical Connection Options

8-Pin Mini-DIN / 9-pin D-sub (DB9) / 15-pin D-sub (DB15) / 6-pin locking / 8-pin M12

Supply Voltage

MC: 12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs)

MCR: 24 to 30 Vdc

Supply Current

MC: 0.250 Amp

MCR: 0.750 Amp (MCRH: 2.0 Amp)

1.  The Digital Output Signal communicates Mass Flow, Volumetric Flow, Pressure and Temperature
2.  The Analog Output Signal and Optional Secondary Analog Output Signal communicate your choice of Mass Flow, Volumetric Flow, Pressure or Temperature

Features

MC & MCR Mass Flow Controller

Gas Select™ 5.0

Gas Select™ 5.0 provides 98 Preloaded Gas Calibrations: See the following page for a complete list.
If your application calls for a gas not on this list, please let us know. We can also calibrate to a wide variety of complex gas mixtures involving up to eight gas constituents.

COMPOSER™

COMPOSER™ is a feature of Gas Select™ 5.0 that allows users to defines up to 20 user gas compositions with up to 5 constituent gases per mix.